Semiconductor chemical and biochemical sensors
نویسندگان
چکیده
In this paper, problems related to the fabrication of semiconductor (bio)chemical sensors and microreactors, including modification of the surface of different materials (semiconductors, dielectric materials, polymers) to create a sensing membrane on the transducer’s surface and immobilise bioreceptors namely enzymes are discussed.
منابع مشابه
Microfabrication Techniques for Chemical/Biosensors
Microfabrication processes for chemical and biochemical sensors are reviewed. Standard processing steps originating from semiconductor technology are detailed, and specific micromachining steps to fabricate three-dimensional mechanical structures are described. Fundamental chemical sensor principles are briefly abstracted and corresponding state-of-the-art examples of microfabricated chemical s...
متن کاملImmobilized Bioelectrochemical Sensors
Presently there are a number of fine and sensitive methods for determining chemical or biochemical substance among which bio electrodes represent the most recent development. Bioelectrodes consist of biologically active materials (e.g enzyme, antibody, whole cell or cell fragments) held in close proximity to a suitable electrochemical transducer that sense specific electroactive enzyme subs...
متن کاملIon sensitive Field Effect Transistors (ISFETs) Basics and Applications
Microfabricated semiconductor devices are essential components of many biochemical sensors today, and show great potential for advanced devices in the future. Since the proposal of an pH sensitive device, based on the technology of field effect transistors, was made in the early seventies, these so called ISFETs have been of great interest for the application in chemical and biological sensing ...
متن کاملبررسی خواص حسگری لایه‌های اکسید قلع نانوساختار لایه‌نشانی شده به روش‌های تبخیر گرمایی و کَند و پاش نسبت به اتانول
In this paper, manufacturing and evaluation of ethanol gas sensors based on thin films of nanostructure tin oxide have been investigated. SnO2 thin films were prepared by both thermal evaporation (type I) and sputtering (type II) methods and heat treated on silicon wafer substrates. Scanning electron microscope (SEM), atomic force microscope (AFM), X-ray diffraction (XRD) and energy dispersive ...
متن کاملGallium Nitride-Based Chemical Sensors
The rapid progress in semiconductor materials and devices has promoted the development of the sensors industry. Large band gap semiconductors are ideal candidates for a variety of sensor applications. In particular, gallium nitride (GaN) is used as the sensing element for the development of chemical sensors. The recognition mechanism is based on the selective interaction of anions in solution w...
متن کاملذخیره در منابع من
با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید
عنوان ژورنال:
دوره شماره
صفحات -
تاریخ انتشار 2004